Micromirror comsol tutorial pdf

Intro to modeling heat transfer with comsol multiphysics. We discuss methods that involve simple approximations, highfidelity nonisothermal flow coupling, modeling heat transfer at fluidsolid interfaces, boundary approximations using heat transfer coefficients, techniques to fully resolve the flow and temperature fields, and more. This model example illustrates applications of this type that would nominally be built using the. The comsol multiphysics physics builder users guide. The effects that need to be taken into account are heat transfer, transport of water vapor, and fluid flow. If you are reading the documentation as a pdf file on your computer, the blue links do not work to open a model or content referenced in a different users guide. By the end you will be well on your way to reaping all.

Optics simulation with comsol multiphysics simulating graphenebased photonic and optoelectronic devices live demo graphene frequency and time domain modeling. It is typically quite small, and arrays of such devices can be implemented in projectors. Particular functionality may be common to several products. Design and analysis of the performance of a torsional micromirror for an optical switching system, ajay a. The plot shows the curvature or displacement in the prestressed plated device. Model with comsol multiphysics on meshes based on mri and scanned data the following software support export to comsol mesh format mimics by materialise, read more on. A method to enhance stroke level of a mems micromirror. A method to enhance stroke level of a mems micromirror with. This tutorial shows how to couple three physics interfaces to model evaporative cooling. Design and simulation of mems based electrothermal. The application gallery features comsol multiphysics. More in depth and advanced topics included with this tutorial are used to show you some of the many options available in comsol.

If you click on no flux 1 you can find the equation that is applied under equation and the boundary on which this equation is applied. Multiphysics modeling of mems devices november 20 executive summary power is increased with dedicated tools. This will open up comsol library where you see many comsol files to solve chemical reaction engineering problems. Vibrating micromirror with viscous and thermal damping comsol. The pressure and the velocity field are the solution of the navierstokes equations. Lets change a parameter and see the effect on the profile. This video shows how to set up a model of flow through an etched micromodel using comsol.

The equations of motion are averaged over volumes which are small compared to the computational domain but large compared to the size of the dispersed particlesbubblesdroplets. Following the steps given in the documentation of the comsol heat conduction in a slab tutorial see next page. An approach for model updating of a multiphysics mems. Learn how to use comsol multiphysics simulation software at a guided training course or webinar. Change the inlet concentration in tank 1 from molm3 to 1500 molm3. Semiconductor module updates for users of the semiconductor module, comsol multiphysics version 5. Jan 25, 2015 this video shows how to set up a model of flow through an etched micromodel using comsol. Micromirror model is simulated using comsol multiphysics 4. Bhattacharyya1 1institute of radio physics and electronics, university of calcutta, west bengal, india corresponding author.

It also provides a quick introduction to creating applications using the application builder. A model of an electrostatically controlled micromirror was developed using the mems module with the large deformation and initial stress features. Home tutorials comsol tutorials comsol tutorials download. The ga is coupled to a commercially available multiphysics finite element program. Submit a plot similar to figure 52 in the documentation. In part a of the tutorial we construct the geometry of the problem to be solved. To view the mass transfer boundary conditions, expand the transport of diluted species and view the various tabs which include boundary conditions and initial values. The comsol multiphysics fea software comes with predefined physics interfaces with specialized settings, making it easy to set up and run analyses. This example describes an array of heating tubes submerged in a vessel with fluid flow entering at the bottom. Under input section on the left hand side, you can view and change any parameter values. The approach is demonstrated on a microelectromechanical mems micromirror which is governed by both structural and electrostatic physics.

Vibrating micromirror with viscous and thermal damping tutorial. Request pdf a comsol model to analyse the structural mechanical problem in an electrostatically controlled prestressed micromirror in nowadays. In order to solve linear system comsol has several solvers. In a parallel plate micromirror model, when a dc voltage is. As alternative we can use the already constructed geometry by applying the steps from part b. Simulating graphenebased photonic and optoelectronic. Jun 25, 2019 comsol mems tutorial pdf posted on june 25, 2019 by admin the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. A comsol model to analyse the structural mechanical problem in. To access any comsol files, you need to have a comsol account which can be created for free. Download the model files and stepbystep instructions here. Analyzing the viscous and thermal damping of a mems. Application areas include mechanical engineering, civil engineering, geomechanics, biomechanics, and. Comsol tutorial heat conduction in a simple heat sink aluminium cooling a high voltage copper cable.

Comsol, comsol multiphysics, comsol script, comsol reaction engineering lab, and. Apr 02, 2020 comsol mems tutorial pdf the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. Tutorial for running comsol files from comsol website. The informative charts give you an idea of comsols capability by associated files, functions, and builtin options. The best source for comsol is absolutely its documentations and the comsol website. Sep 05, 2006 the ga is coupled to a commercially available multiphysics finite element program. The user can simulate a design, test for the capacitance and observe the effects on capacitance by changing parameters such as dielectric permittivity of materials. Broers building 21 j j thomson avenue cambridge cb3 0fa. Watch this archived webinar to learn how to simulate heat transfer in fluids using the comsol multiphysics software. We calculate the heat conduction in a simple heat sink aluminium cooling a high voltage copper cable. You dont need any previous knowledge about this program and will get to know the basics in order to perform your own simple simulation and analyse the obtained data. In the context of this, issues of mode tracking, eigenvector comparisons, and approximate function evaluations are discussed.

Click on tank volume tab to view the volume of each tank with time step 7. For various applied voltage, it produces displacements in eight different directions. Capacitive sensor design using comsol provides the user with a wide variety of tools. The ideal schottky, thermionic emission, and continuous quasifermi level boundary conditions have been enhanced to improve the accuracy of your semiconductor models, while saving. The combination of comsol products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Introduction to comsol multiphysics 19982012 comsol protected by u.

Pdf micromirror is a very small mirror based on the principle of micro electro. Click on comsol access present at the bottom of the page. Warning your internet explorer is in compatibility mode and may not be displaying the website correctly. The coupled multiphysics simulation and study of the electrical, thermal and most importantly, the mechanical behavior of the mirror is done using thermalelectricstructural interaction mode of comsol. Comsol desktop there is a corresponding command you can type at the matlab prompt. Comsol environment facilitates further analysis by making whatif cases easy to. The proposed micromirror employs a parallel plate mirror structure held by lshaped arms on all four sides of the micromirror 22,23 and is simulated using comsol multiphysics. Apr 02, 2012 donate and download files in full hd here. Comsol lep tutorial for tank flow system two cstr in series. After you are done, click on compute button present above the input. This model of a vibrating micromirror surrounded by air uses the thermoacousticshell interaction user interface to model the fluidsolid interaction, and it thus includes the correct viscous and thermal damping of the mirror from the surrounding air. The comsol desktop 7 the comsol desktop the user interface streamlines the modeling workflow with the model builder. For example, one well known mems device is the accelerometer i. Containing a model tree, the model builder outlines the structure of your model.

One such device is the electrostatically controlled micromirror. Comsol multiphysics simulations of microfluidic systems for biomedical applications maria dimaki, jacob moresco lange, patricia vazquez, pranjul shah, fridolin okkels and winnie edith svendsen dtu nanotech department of micro and nanotechnology, technical university of denmark, dk2800, kgs. Study the effect of thermal stress on resonant frequency. Comsol multiphysics simulations of microfluidic systems. An automatic notification and case number is sent to you by email. An approach for model updating of a multiphysics mems micromirror. Design and modeling of an electrostatic ally actuated mems. The driving voltage is given in the anchor end which produces larger displacement. Fem analysis using comsol multiphysics in order to analyze the static behavior of the micromirror, comsol multiphysics fem software is used. Structural mechanical analysis of mems micromirror using. In a parallel plate micromirror model, when a dc voltage is applied between the two plates, the generated electrostatic force, f d, pulls the micromirror surface. Setup the model using the graphical user interface, then save the model as a mfile. What are good sources of tutorials to learn comsol.

The plating process can control this stress even for similar materials. E possibile scaricare i file dei modelli e delle app demo pronti alluso e le. It provides an overview of the comsol environment with examples that show you how to use the comsol desktop user interface and the model builder. After a general introduction to the user interface, several tutorials will take you step by step through sample models that highlight important features. A 4arm ushaped actuator with a micromirror has been designed. The wet surface feature is used to implement the source term for the water vapor and to. In the comsol multiphysics software any number of physics can be combined in one and the same simulation. In this tutorial, we will solve one physical problem using a numerical toolbox called comsol multiphysics femlab. With comsol, it is also possible to observe the effects of temperature on the capacitance value. Dmd for digital cinema next to a dmd for pico displays. Uber comsol multiphysics modellierungsbeispiele zum.

Research article some aspects of analysis of a micromirror. Comsol is the developer of comsol multiphysics software, an interactive environment for modeling and simulating scientific and engineering problems. Simulating graphenebased photonic and optoelectronic devices. Comsol mems tutorial pdf the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and. See how to simulate a vibrating micromirror surrounded by air using comsol multiphysics. This is a multiphysics model because it involves fluid dynamics coupled with heat transfer. The model is based on a micromodel described by oostrom et al. Jun 30, 2019 comsol mems tutorial pdf the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and. This is a simplified java based syntax, which does not required any knowledge.

Uh innovation centre college lane hatfield hertfordshire al10 9ab. The structural mechanics module includes both predefined material models to choose from and the ability to enter userdefined material models, depending on the nature of your analysis. Modeling using the graphical user interface3d example. Use the comsol desktop to get your first model implemented using the comsol java api.

Micromirrors are used in certain mems devices to control optic elements. Click on run in browser to start the application you will see that following window opens which has input parameters, description, graphical features and a few buttons. Femlab heat transfer tutorial rev rowan university. Vibrating micromirror with viscous and thermal damping. Direct solver conjugate gradient solver cgs gmres solver fgmres solver bicgstab geometric multigrid gmg an example of gmg solver. Of course, i cant share a clients project so here i will use a basic mems micromirror structure for illustrative purposes. This section shows the fundamentals of how to set up and solve the liftoff of a prestressed plated devices. Pdf some aspects of analysis of a micromirror researchgate. And do not forget about right click, you could do every modeling and simulation just with right click. Multiphysics software for finite element approach and real world simulations. Furthermore, this example may also be defined and modeled using components from the following product combinations. Micromirror and thinfilm resonator are pure continuum mechanics models. Design of mems based elecrostatically controlled micromirror.

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